Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System
Advanced Energy's Paramount HFi is a 13.56 MHz RF power delivery system with an integrated solid-state matching network capable of operating across a wide variety of impedance zones. The solution offers consistent power delivery, high power density, and exceptional reliability.
- Minimize footprint by mounting the integrated system directly onto the chamber
- Achieve repeatable power delivery across a wide impedance zone with 32 tune range positions
- High reliability and reproducibility due to no moving parts
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